Science & Technology
SBIR Phase I: Advanced PEALD Processing Technology using Nanosecond Pulse Power
National Science Foundation
Opportunity #: 2451318
Award Ceiling
$305K
Award Floor
$305K
Close Date
Sep 30, 2025
Total Funding
$305K
Expected Awards
1
Posted Date
Feb 13, 2025
Cost Sharing Required
No
Grants.gov ID
sbir-2451318
Description
SBIR Phase Phase I award: "SBIR Phase I: Advanced PEALD Processing Technology using Nanosecond Pulse Power" awarded to Stellar Engiine in Los Altos, California. Funded by National Science Foundation. Award amount: $305,000. The SBIR/STTR programs fund innovative research and development by small businesses, with Phase I for feasibility studies and Phase II for full R&D.
Eligible Applicants
Small businesses
Apply on Grants.gov
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