R&D to enable Scanning Microwave Impedance Microscopy for metrology in advanced FAB?s Measurement technology for in-line Metrology which has applications in materials purity, electrical properties
Department of Commerce — National Institute of Standards and Technology – CHIPS
Opportunity #: 70NANB24H263
Description
SBIR Phase Phase I award: "R&D to enable Scanning Microwave Impedance Microscopy for metrology in advanced FAB?s Measurement technology for in-line Metrology which has applications in materials purity, electrical properties" awarded to PRIMENANO, INC. in SANTA CLARA, California. Funded by Department of Commerce (National Institute of Standards and Technology – CHIPS). Award amount: $259,848.73. The SBIR/STTR programs fund innovative research and development by small businesses, with Phase I for feasibility studies and Phase II for full R&D.
Eligible Applicants
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