Science & Technology

Rapid and Accurate High-Resolution Ion Microscopy for Semiconductor Metrology

Department of Commerce — National Institute of Standards and Technology – CHIPS

Opportunity #: 70NANB24H277

Award Ceiling

$290K

Award Floor

$290K

Close Date

Mar 30, 2027

380 days left

Total Funding

$290K

Expected Awards

Posted Date

Sep 17, 2024

Cost Sharing Required

Grants.gov ID

sbir-70NANB24H277

Description

SBIR Phase Phase I award: "Rapid and Accurate High-Resolution Ion Microscopy for Semiconductor Metrology" awarded to STEAM INSTRUMENTS INC in MADISON, Wisconsin. Funded by Department of Commerce (National Institute of Standards and Technology – CHIPS). Award amount: $289,529. The SBIR/STTR programs fund innovative research and development by small businesses, with Phase I for feasibility studies and Phase II for full R&D.

Eligible Applicants

Small businesses

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