Science & Technology

Binary Pseudo Random Array (BPRA) Standards, Protocol, and Software for EUV Lithography Tool Enhancement

Department of Commerce — National Institute of Standards and Technology – CHIPS

Opportunity #: 70NANB24H265

Award Ceiling

$283K

Award Floor

$283K

Close Date

Sep 30, 2027

564 days left

Total Funding

$283K

Expected Awards

Posted Date

Sep 17, 2024

Cost Sharing Required

Grants.gov ID

sbir-70NANB24H265

Description

SBIR Phase Phase I award: "Binary Pseudo Random Array (BPRA) Standards, Protocol, and Software for EUV Lithography Tool Enhancement" awarded to HIGHRI OPTICS, INC. in OAKLAND, California. Funded by Department of Commerce (National Institute of Standards and Technology – CHIPS). Award amount: $283,009.12. The SBIR/STTR programs fund innovative research and development by small businesses, with Phase I for feasibility studies and Phase II for full R&D.

Eligible Applicants

Small businesses, Women-owned businesses

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